6/4/2010	7:19:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/4/2010	7:19:20 AM	Recipe started at 7:19 AM
6/4/2010	7:19:20 AM	H2 valve closed
6/4/2010	7:19:20 AM	BCl3 valve closed
6/4/2010	7:19:20 AM	PH3 valve closed
6/4/2010	7:19:20 AM	SiCl4 pre valve closed
6/4/2010	7:19:20 AM	SiCl4 post valve closed
6/4/2010	7:19:20 AM	Main Vac valve closed
6/4/2010	7:19:20 AM	Bypass valve closed
6/4/2010	7:19:20 AM	Bubbler valve closed
6/4/2010	7:19:20 AM	Helium valve opened
6/4/2010	7:19:20 AM	Helium MFC set to  500.000000
6/4/2010	7:19:20 AM	H2 MFC set to  0.000000
6/4/2010	7:19:20 AM	BCl3 MFC set to  0.000000
6/4/2010	7:19:20 AM	PHl3 MFC set to  0.000000
6/4/2010	7:19:20 AM	SiCl4 MFC set to  0.000000
6/4/2010	7:19:20 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	7:19:20 AM	Tube furnace set to 0
6/4/2010	7:20:40 AM	Helium valve closed
6/4/2010	7:20:40 AM	H2 valve closed
6/4/2010	7:20:40 AM	BCl3 valve closed
6/4/2010	7:20:40 AM	PH3 valve closed
6/4/2010	7:20:40 AM	SiCl4 pre valve closed
6/4/2010	7:20:40 AM	SiCl4 post valve closed
6/4/2010	7:20:41 AM	Main Vac valve closed
6/4/2010	7:20:41 AM	Bypass valve closed
6/4/2010	7:20:41 AM	Bubbler valve closed
6/4/2010	7:20:41 AM	Helium MFC set to  0.000000
6/4/2010	7:20:41 AM	H2 MFC set to  0.000000
6/4/2010	7:20:41 AM	BCl3 MFC set to  0.000000
6/4/2010	7:20:41 AM	PHl3 MFC set to  0.000000
6/4/2010	7:20:41 AM	SiCl4 MFC set to  0.000000
6/4/2010	7:20:41 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	7:20:41 AM	Tube furnace set to 0
6/4/2010	7:20:41 AM	Run finished at 7:20 AM
6/4/2010	7:20:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/4/2010	7:29:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/4/2010	7:29:09 AM	Recipe started at 7:29 AM
6/4/2010	7:29:09 AM	Helium valve closed
6/4/2010	7:29:09 AM	H2 valve closed
6/4/2010	7:29:09 AM	BCl3 valve closed
6/4/2010	7:29:09 AM	PH3 valve closed
6/4/2010	7:29:09 AM	SiCl4 pre valve closed
6/4/2010	7:29:09 AM	SiCl4 post valve closed
6/4/2010	7:29:09 AM	Main Vac valve closed
6/4/2010	7:29:09 AM	Bubbler valve closed
6/4/2010	7:29:09 AM	Bypass valve opened
6/4/2010	7:29:09 AM	Helium MFC set to  0.000000
6/4/2010	7:29:09 AM	H2 MFC set to  0.000000
6/4/2010	7:29:09 AM	BCl3 MFC set to  0.000000
6/4/2010	7:29:09 AM	PHl3 MFC set to  0.000000
6/4/2010	7:29:09 AM	SiCl4 MFC set to  0.000000
6/4/2010	7:29:09 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	7:29:09 AM	Tube furnace set to 0
6/4/2010	7:29:56 AM	Helium valve closed
6/4/2010	7:29:56 AM	H2 valve closed
6/4/2010	7:29:56 AM	BCl3 valve closed
6/4/2010	7:29:56 AM	PH3 valve closed
6/4/2010	7:29:56 AM	SiCl4 pre valve closed
6/4/2010	7:29:56 AM	SiCl4 post valve closed
6/4/2010	7:29:56 AM	Bubbler valve closed
6/4/2010	7:29:56 AM	Main Vac valve opened
6/4/2010	7:29:56 AM	Bypass valve opened
6/4/2010	7:29:56 AM	Helium MFC set to  0.000000
6/4/2010	7:29:56 AM	H2 MFC set to  0.000000
6/4/2010	7:29:56 AM	BCl3 MFC set to  0.000000
6/4/2010	7:29:56 AM	PHl3 MFC set to  0.000000
6/4/2010	7:29:56 AM	SiCl4 MFC set to  0.000000
6/4/2010	7:29:56 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	7:29:56 AM	Tube furnace set to 0
6/4/2010	7:29:56 AM	Run finished at 7:29 AM
6/4/2010	7:29:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/4/2010	7:30:19 AM	Helium MFC set to  100.000000
6/4/2010	7:30:20 AM	Helium valve opened
6/4/2010	7:40:23 AM	Helium MFC set to  0.000000
6/4/2010	7:40:25 AM	Helium valve closed
6/4/2010	7:41:01 AM	Helium MFC set to  100.000000
6/4/2010	7:41:03 AM	Helium valve opened
6/4/2010	7:50:03 AM	Helium MFC set to  0.000000
6/4/2010	7:50:04 AM	Helium valve closed
6/4/2010	7:50:04 AM	Helium valve opened
6/4/2010	7:50:05 AM	Helium valve closed
6/4/2010	7:50:51 AM	Helium MFC set to  100.000000
6/4/2010	7:50:51 AM	Helium valve opened
6/4/2010	7:57:34 AM	Helium MFC set to  0.000000
6/4/2010	7:57:35 AM	Helium valve closed
6/4/2010	7:58:32 AM	Bypass valve closed
6/4/2010	7:58:32 AM	Main Vac valve closed
6/4/2010	7:58:42 AM	Main Vac valve opened
6/4/2010	7:58:43 AM	Bypass valve opened
6/4/2010	7:58:45 AM	Helium MFC set to  10.000000
6/4/2010	7:58:47 AM	Helium valve opened
6/4/2010	7:58:53 AM	Helium MFC set to  20.000000
6/4/2010	7:59:00 AM	Helium MFC set to  0.000000
6/4/2010	7:59:01 AM	Helium valve closed
6/4/2010	7:59:50 AM	Helium MFC set to  500.000000
6/4/2010	7:59:51 AM	Helium valve opened
6/4/2010	8:00:23 AM	Helium MFC set to  0.000000
6/4/2010	8:00:23 AM	Helium valve closed
6/4/2010	8:01:21 AM	Recipe started at 8:01 AM
6/4/2010	8:01:21 AM	Helium valve closed
6/4/2010	8:01:21 AM	BCl3 valve closed
6/4/2010	8:01:21 AM	PH3 valve closed
6/4/2010	8:01:21 AM	SiCl4 pre valve closed
6/4/2010	8:01:21 AM	SiCl4 post valve closed
6/4/2010	8:01:21 AM	Main Vac valve closed
6/4/2010	8:01:21 AM	Bypass valve closed
6/4/2010	8:01:21 AM	Bubbler valve closed
6/4/2010	8:01:21 AM	H2 valve opened
6/4/2010	8:01:21 AM	Helium MFC set to  0.000000
6/4/2010	8:01:21 AM	H2 MFC set to  500.000000
6/4/2010	8:01:21 AM	BCl3 MFC set to  0.000000
6/4/2010	8:01:21 AM	PHl3 MFC set to  0.000000
6/4/2010	8:01:21 AM	SiCl4 MFC set to  0.000000
6/4/2010	8:01:21 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	8:01:21 AM	Tube furnace set to 0
6/4/2010	8:02:44 AM	Helium valve closed
6/4/2010	8:02:44 AM	BCl3 valve closed
6/4/2010	8:02:44 AM	PH3 valve closed
6/4/2010	8:02:44 AM	SiCl4 pre valve closed
6/4/2010	8:02:44 AM	SiCl4 post valve closed
6/4/2010	8:02:44 AM	Main Vac valve closed
6/4/2010	8:02:44 AM	Bypass valve closed
6/4/2010	8:02:44 AM	H2 valve opened
6/4/2010	8:02:44 AM	Bubbler valve opened
6/4/2010	8:02:44 AM	Helium MFC set to  0.000000
6/4/2010	8:02:44 AM	H2 MFC set to  500.000000
6/4/2010	8:02:44 AM	BCl3 MFC set to  0.000000
6/4/2010	8:02:44 AM	PHl3 MFC set to  0.000000
6/4/2010	8:02:44 AM	SiCl4 MFC set to  0.000000
6/4/2010	8:02:44 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	8:02:44 AM	Tube furnace set to 1000
6/4/2010	8:22:44 AM	Helium valve closed
6/4/2010	8:22:44 AM	PH3 valve closed
6/4/2010	8:22:44 AM	Main Vac valve closed
6/4/2010	8:22:44 AM	Bypass valve closed
6/4/2010	8:22:44 AM	H2 valve opened
6/4/2010	8:22:44 AM	BCl3 valve opened
6/4/2010	8:22:44 AM	SiCl4 pre valve opened
6/4/2010	8:22:44 AM	SiCl4 post valve opened
6/4/2010	8:22:44 AM	Bubbler valve opened
6/4/2010	8:22:44 AM	Helium MFC set to  0.000000
6/4/2010	8:22:44 AM	H2 MFC set to  500.000000
6/4/2010	8:22:44 AM	BCl3 MFC set to  35.000000
6/4/2010	8:22:44 AM	PHl3 MFC set to  0.000000
6/4/2010	8:22:44 AM	SiCl4 MFC set to  50.000000
6/4/2010	8:22:44 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	8:22:44 AM	Tube furnace set to 1000
6/4/2010	8:37:44 AM	H2 valve closed
6/4/2010	8:37:44 AM	BCl3 valve closed
6/4/2010	8:37:44 AM	PH3 valve closed
6/4/2010	8:37:44 AM	SiCl4 pre valve closed
6/4/2010	8:37:44 AM	SiCl4 post valve closed
6/4/2010	8:37:44 AM	Main Vac valve closed
6/4/2010	8:37:44 AM	Bypass valve closed
6/4/2010	8:37:44 AM	Helium valve opened
6/4/2010	8:37:44 AM	Bubbler valve opened
6/4/2010	8:37:44 AM	Helium MFC set to  500.000000
6/4/2010	8:37:44 AM	H2 MFC set to  0.000000
6/4/2010	8:37:44 AM	BCl3 MFC set to  0.000000
6/4/2010	8:37:44 AM	PHl3 MFC set to  0.000000
6/4/2010	8:37:44 AM	SiCl4 MFC set to  0.000000
6/4/2010	8:37:44 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	8:37:45 AM	Tube furnace set to 0
6/4/2010	8:57:45 AM	Helium valve closed
6/4/2010	8:57:45 AM	H2 valve closed
6/4/2010	8:57:45 AM	BCl3 valve closed
6/4/2010	8:57:45 AM	PH3 valve closed
6/4/2010	8:57:45 AM	SiCl4 pre valve closed
6/4/2010	8:57:45 AM	SiCl4 post valve closed
6/4/2010	8:57:45 AM	Main Vac valve closed
6/4/2010	8:57:45 AM	Bypass valve closed
6/4/2010	8:57:45 AM	Bubbler valve closed
6/4/2010	8:57:45 AM	Helium MFC set to  0.000000
6/4/2010	8:57:45 AM	H2 MFC set to  0.000000
6/4/2010	8:57:45 AM	BCl3 MFC set to  0.000000
6/4/2010	8:57:45 AM	PHl3 MFC set to  0.000000
6/4/2010	8:57:45 AM	SiCl4 MFC set to  0.000000
6/4/2010	8:57:45 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	8:57:45 AM	Tube furnace set to 0
6/4/2010	8:57:45 AM	Run finished at 8:57 AM
6/4/2010	9:21:34 AM	Recipe started at 9:21 AM
6/4/2010	9:21:34 AM	Helium valve closed
6/4/2010	9:21:34 AM	H2 valve closed
6/4/2010	9:21:34 AM	BCl3 valve closed
6/4/2010	9:21:34 AM	PH3 valve closed
6/4/2010	9:21:34 AM	SiCl4 pre valve closed
6/4/2010	9:21:34 AM	SiCl4 post valve closed
6/4/2010	9:21:34 AM	Main Vac valve closed
6/4/2010	9:21:34 AM	Bubbler valve closed
6/4/2010	9:21:34 AM	Bypass valve opened
6/4/2010	9:21:34 AM	Helium MFC set to  0.000000
6/4/2010	9:21:34 AM	H2 MFC set to  0.000000
6/4/2010	9:21:34 AM	BCl3 MFC set to  0.000000
6/4/2010	9:21:34 AM	PHl3 MFC set to  0.000000
6/4/2010	9:21:34 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:21:34 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:21:34 AM	Tube furnace set to 0
6/4/2010	9:22:21 AM	Helium valve closed
6/4/2010	9:22:21 AM	H2 valve closed
6/4/2010	9:22:21 AM	BCl3 valve closed
6/4/2010	9:22:21 AM	PH3 valve closed
6/4/2010	9:22:21 AM	SiCl4 pre valve closed
6/4/2010	9:22:21 AM	SiCl4 post valve closed
6/4/2010	9:22:21 AM	Bubbler valve closed
6/4/2010	9:22:21 AM	Main Vac valve opened
6/4/2010	9:22:21 AM	Bypass valve opened
6/4/2010	9:22:21 AM	Helium MFC set to  0.000000
6/4/2010	9:22:21 AM	H2 MFC set to  0.000000
6/4/2010	9:22:21 AM	BCl3 MFC set to  0.000000
6/4/2010	9:22:21 AM	PHl3 MFC set to  0.000000
6/4/2010	9:22:21 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:22:21 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:22:21 AM	Tube furnace set to 0
6/4/2010	9:23:21 AM	H2 valve closed
6/4/2010	9:23:21 AM	BCl3 valve closed
6/4/2010	9:23:21 AM	PH3 valve closed
6/4/2010	9:23:21 AM	SiCl4 pre valve closed
6/4/2010	9:23:21 AM	SiCl4 post valve closed
6/4/2010	9:23:21 AM	Bubbler valve closed
6/4/2010	9:23:21 AM	Helium valve opened
6/4/2010	9:23:21 AM	Main Vac valve opened
6/4/2010	9:23:21 AM	Bypass valve opened
6/4/2010	9:23:21 AM	Helium MFC set to  100.000000
6/4/2010	9:23:21 AM	H2 MFC set to  0.000000
6/4/2010	9:23:21 AM	BCl3 MFC set to  0.000000
6/4/2010	9:23:21 AM	PHl3 MFC set to  0.000000
6/4/2010	9:23:21 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:23:21 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:23:21 AM	Tube furnace set to 0
6/4/2010	9:24:21 AM	Helium valve closed
6/4/2010	9:24:21 AM	H2 valve closed
6/4/2010	9:24:21 AM	BCl3 valve closed
6/4/2010	9:24:21 AM	PH3 valve closed
6/4/2010	9:24:21 AM	SiCl4 pre valve closed
6/4/2010	9:24:21 AM	SiCl4 post valve closed
6/4/2010	9:24:21 AM	Bubbler valve closed
6/4/2010	9:24:21 AM	Main Vac valve opened
6/4/2010	9:24:21 AM	Bypass valve opened
6/4/2010	9:24:21 AM	Helium MFC set to  0.000000
6/4/2010	9:24:21 AM	H2 MFC set to  0.000000
6/4/2010	9:24:21 AM	BCl3 MFC set to  0.000000
6/4/2010	9:24:21 AM	PHl3 MFC set to  0.000000
6/4/2010	9:24:21 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:24:21 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:24:21 AM	Tube furnace set to 0
6/4/2010	9:25:21 AM	H2 valve closed
6/4/2010	9:25:21 AM	BCl3 valve closed
6/4/2010	9:25:21 AM	PH3 valve closed
6/4/2010	9:25:21 AM	SiCl4 pre valve closed
6/4/2010	9:25:21 AM	SiCl4 post valve closed
6/4/2010	9:25:21 AM	Bubbler valve closed
6/4/2010	9:25:21 AM	Helium valve opened
6/4/2010	9:25:21 AM	Main Vac valve opened
6/4/2010	9:25:21 AM	Bypass valve opened
6/4/2010	9:25:21 AM	Helium MFC set to  100.000000
6/4/2010	9:25:21 AM	H2 MFC set to  0.000000
6/4/2010	9:25:21 AM	BCl3 MFC set to  0.000000
6/4/2010	9:25:21 AM	PHl3 MFC set to  0.000000
6/4/2010	9:25:21 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:25:21 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:25:22 AM	Tube furnace set to 0
6/4/2010	9:26:22 AM	Helium valve closed
6/4/2010	9:26:22 AM	H2 valve closed
6/4/2010	9:26:22 AM	BCl3 valve closed
6/4/2010	9:26:22 AM	PH3 valve closed
6/4/2010	9:26:22 AM	SiCl4 pre valve closed
6/4/2010	9:26:22 AM	SiCl4 post valve closed
6/4/2010	9:26:22 AM	Bubbler valve closed
6/4/2010	9:26:22 AM	Main Vac valve opened
6/4/2010	9:26:22 AM	Bypass valve opened
6/4/2010	9:26:22 AM	Helium MFC set to  0.000000
6/4/2010	9:26:22 AM	H2 MFC set to  0.000000
6/4/2010	9:26:22 AM	BCl3 MFC set to  0.000000
6/4/2010	9:26:22 AM	PHl3 MFC set to  0.000000
6/4/2010	9:26:22 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:26:22 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:26:22 AM	Tube furnace set to 0
6/4/2010	9:27:22 AM	H2 valve closed
6/4/2010	9:27:22 AM	BCl3 valve closed
6/4/2010	9:27:22 AM	PH3 valve closed
6/4/2010	9:27:22 AM	SiCl4 pre valve closed
6/4/2010	9:27:22 AM	SiCl4 post valve closed
6/4/2010	9:27:22 AM	Bubbler valve closed
6/4/2010	9:27:22 AM	Helium valve opened
6/4/2010	9:27:22 AM	Main Vac valve opened
6/4/2010	9:27:22 AM	Bypass valve opened
6/4/2010	9:27:22 AM	Helium MFC set to  100.000000
6/4/2010	9:27:22 AM	H2 MFC set to  0.000000
6/4/2010	9:27:22 AM	BCl3 MFC set to  0.000000
6/4/2010	9:27:22 AM	PHl3 MFC set to  0.000000
6/4/2010	9:27:22 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:27:22 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:27:22 AM	Tube furnace set to 0
6/4/2010	9:28:22 AM	Helium valve closed
6/4/2010	9:28:22 AM	H2 valve closed
6/4/2010	9:28:22 AM	BCl3 valve closed
6/4/2010	9:28:22 AM	PH3 valve closed
6/4/2010	9:28:22 AM	SiCl4 pre valve closed
6/4/2010	9:28:22 AM	SiCl4 post valve closed
6/4/2010	9:28:22 AM	Bubbler valve closed
6/4/2010	9:28:22 AM	Main Vac valve opened
6/4/2010	9:28:22 AM	Bypass valve opened
6/4/2010	9:28:22 AM	Helium MFC set to  0.000000
6/4/2010	9:28:22 AM	H2 MFC set to  0.000000
6/4/2010	9:28:22 AM	BCl3 MFC set to  0.000000
6/4/2010	9:28:22 AM	PHl3 MFC set to  0.000000
6/4/2010	9:28:22 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:28:22 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:28:22 AM	Tube furnace set to 0
6/4/2010	9:29:22 AM	H2 valve closed
6/4/2010	9:29:22 AM	BCl3 valve closed
6/4/2010	9:29:22 AM	PH3 valve closed
6/4/2010	9:29:22 AM	SiCl4 pre valve closed
6/4/2010	9:29:22 AM	SiCl4 post valve closed
6/4/2010	9:29:22 AM	Bubbler valve closed
6/4/2010	9:29:22 AM	Helium valve opened
6/4/2010	9:29:22 AM	Main Vac valve opened
6/4/2010	9:29:22 AM	Bypass valve opened
6/4/2010	9:29:22 AM	Helium MFC set to  100.000000
6/4/2010	9:29:22 AM	H2 MFC set to  0.000000
6/4/2010	9:29:22 AM	BCl3 MFC set to  0.000000
6/4/2010	9:29:22 AM	PHl3 MFC set to  0.000000
6/4/2010	9:29:22 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:29:22 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:29:22 AM	Tube furnace set to 0
6/4/2010	9:30:22 AM	Helium valve closed
6/4/2010	9:30:22 AM	H2 valve closed
6/4/2010	9:30:22 AM	BCl3 valve closed
6/4/2010	9:30:22 AM	PH3 valve closed
6/4/2010	9:30:22 AM	SiCl4 pre valve closed
6/4/2010	9:30:22 AM	SiCl4 post valve closed
6/4/2010	9:30:22 AM	Bubbler valve closed
6/4/2010	9:30:22 AM	Main Vac valve opened
6/4/2010	9:30:22 AM	Bypass valve opened
6/4/2010	9:30:22 AM	Helium MFC set to  0.000000
6/4/2010	9:30:22 AM	H2 MFC set to  0.000000
6/4/2010	9:30:22 AM	BCl3 MFC set to  0.000000
6/4/2010	9:30:22 AM	PHl3 MFC set to  0.000000
6/4/2010	9:30:22 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:30:22 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:30:22 AM	Tube furnace set to 0
6/4/2010	9:30:23 AM	Run finished at 9:30 AM
6/4/2010	9:34:59 AM	Recipe started at 9:34 AM
6/4/2010	9:34:59 AM	Helium valve closed
6/4/2010	9:34:59 AM	H2 valve closed
6/4/2010	9:34:59 AM	BCl3 valve closed
6/4/2010	9:34:59 AM	PH3 valve closed
6/4/2010	9:34:59 AM	SiCl4 pre valve closed
6/4/2010	9:34:59 AM	SiCl4 post valve closed
6/4/2010	9:34:59 AM	Main Vac valve closed
6/4/2010	9:34:59 AM	Bubbler valve closed
6/4/2010	9:34:59 AM	Bypass valve opened
6/4/2010	9:34:59 AM	Helium MFC set to  0.000000
6/4/2010	9:34:59 AM	H2 MFC set to  0.000000
6/4/2010	9:34:59 AM	BCl3 MFC set to  0.000000
6/4/2010	9:34:59 AM	PHl3 MFC set to  0.000000
6/4/2010	9:34:59 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:34:59 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:35:00 AM	Tube furnace set to 0
6/4/2010	9:35:00 AM	Helium valve closed
6/4/2010	9:35:00 AM	H2 valve closed
6/4/2010	9:35:00 AM	BCl3 valve closed
6/4/2010	9:35:00 AM	PH3 valve closed
6/4/2010	9:35:00 AM	SiCl4 pre valve closed
6/4/2010	9:35:00 AM	SiCl4 post valve closed
6/4/2010	9:35:00 AM	Bubbler valve closed
6/4/2010	9:35:00 AM	Main Vac valve opened
6/4/2010	9:35:00 AM	Bypass valve opened
6/4/2010	9:35:00 AM	Helium MFC set to  0.000000
6/4/2010	9:35:00 AM	H2 MFC set to  0.000000
6/4/2010	9:35:00 AM	BCl3 MFC set to  0.000000
6/4/2010	9:35:00 AM	PHl3 MFC set to  0.000000
6/4/2010	9:35:00 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:35:00 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:35:00 AM	Tube furnace set to 0
6/4/2010	9:35:08 AM	H2 valve closed
6/4/2010	9:35:08 AM	BCl3 valve closed
6/4/2010	9:35:08 AM	PH3 valve closed
6/4/2010	9:35:08 AM	SiCl4 pre valve closed
6/4/2010	9:35:08 AM	SiCl4 post valve closed
6/4/2010	9:35:08 AM	Bubbler valve closed
6/4/2010	9:35:08 AM	Helium valve opened
6/4/2010	9:35:08 AM	Main Vac valve opened
6/4/2010	9:35:08 AM	Bypass valve opened
6/4/2010	9:35:08 AM	Helium MFC set to  500.000000
6/4/2010	9:35:08 AM	H2 MFC set to  0.000000
6/4/2010	9:35:08 AM	BCl3 MFC set to  0.000000
6/4/2010	9:35:08 AM	PHl3 MFC set to  0.000000
6/4/2010	9:35:08 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:35:08 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:35:08 AM	Tube furnace set to 0
6/4/2010	9:36:08 AM	Helium valve closed
6/4/2010	9:36:08 AM	H2 valve closed
6/4/2010	9:36:08 AM	BCl3 valve closed
6/4/2010	9:36:08 AM	PH3 valve closed
6/4/2010	9:36:08 AM	SiCl4 pre valve closed
6/4/2010	9:36:08 AM	SiCl4 post valve closed
6/4/2010	9:36:08 AM	Bubbler valve closed
6/4/2010	9:36:08 AM	Main Vac valve opened
6/4/2010	9:36:08 AM	Bypass valve opened
6/4/2010	9:36:08 AM	Helium MFC set to  0.000000
6/4/2010	9:36:08 AM	H2 MFC set to  0.000000
6/4/2010	9:36:08 AM	BCl3 MFC set to  0.000000
6/4/2010	9:36:08 AM	PHl3 MFC set to  0.000000
6/4/2010	9:36:08 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:36:08 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:36:09 AM	Tube furnace set to 0
6/4/2010	9:37:09 AM	H2 valve closed
6/4/2010	9:37:09 AM	BCl3 valve closed
6/4/2010	9:37:09 AM	PH3 valve closed
6/4/2010	9:37:09 AM	SiCl4 pre valve closed
6/4/2010	9:37:09 AM	SiCl4 post valve closed
6/4/2010	9:37:09 AM	Bubbler valve closed
6/4/2010	9:37:09 AM	Helium valve opened
6/4/2010	9:37:09 AM	Main Vac valve opened
6/4/2010	9:37:09 AM	Bypass valve opened
6/4/2010	9:37:09 AM	Helium MFC set to  500.000000
6/4/2010	9:37:09 AM	H2 MFC set to  0.000000
6/4/2010	9:37:09 AM	BCl3 MFC set to  0.000000
6/4/2010	9:37:09 AM	PHl3 MFC set to  0.000000
6/4/2010	9:37:09 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:37:09 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:37:09 AM	Tube furnace set to 0
6/4/2010	9:38:09 AM	Helium valve closed
6/4/2010	9:38:09 AM	H2 valve closed
6/4/2010	9:38:09 AM	BCl3 valve closed
6/4/2010	9:38:09 AM	PH3 valve closed
6/4/2010	9:38:09 AM	SiCl4 pre valve closed
6/4/2010	9:38:09 AM	SiCl4 post valve closed
6/4/2010	9:38:09 AM	Bubbler valve closed
6/4/2010	9:38:09 AM	Main Vac valve opened
6/4/2010	9:38:09 AM	Bypass valve opened
6/4/2010	9:38:09 AM	Helium MFC set to  0.000000
6/4/2010	9:38:09 AM	H2 MFC set to  0.000000
6/4/2010	9:38:09 AM	BCl3 MFC set to  0.000000
6/4/2010	9:38:09 AM	PHl3 MFC set to  0.000000
6/4/2010	9:38:09 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:38:09 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:38:09 AM	Tube furnace set to 0
6/4/2010	9:39:09 AM	H2 valve closed
6/4/2010	9:39:09 AM	BCl3 valve closed
6/4/2010	9:39:09 AM	PH3 valve closed
6/4/2010	9:39:09 AM	SiCl4 pre valve closed
6/4/2010	9:39:09 AM	SiCl4 post valve closed
6/4/2010	9:39:09 AM	Bubbler valve closed
6/4/2010	9:39:09 AM	Helium valve opened
6/4/2010	9:39:09 AM	Main Vac valve opened
6/4/2010	9:39:09 AM	Bypass valve opened
6/4/2010	9:39:09 AM	Helium MFC set to  500.000000
6/4/2010	9:39:09 AM	H2 MFC set to  0.000000
6/4/2010	9:39:09 AM	BCl3 MFC set to  0.000000
6/4/2010	9:39:09 AM	PHl3 MFC set to  0.000000
6/4/2010	9:39:09 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:39:09 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:39:09 AM	Tube furnace set to 0
6/4/2010	9:40:09 AM	Helium valve closed
6/4/2010	9:40:09 AM	H2 valve closed
6/4/2010	9:40:09 AM	BCl3 valve closed
6/4/2010	9:40:09 AM	PH3 valve closed
6/4/2010	9:40:09 AM	SiCl4 pre valve closed
6/4/2010	9:40:09 AM	SiCl4 post valve closed
6/4/2010	9:40:09 AM	Bubbler valve closed
6/4/2010	9:40:09 AM	Main Vac valve opened
6/4/2010	9:40:09 AM	Bypass valve opened
6/4/2010	9:40:09 AM	Helium MFC set to  0.000000
6/4/2010	9:40:09 AM	H2 MFC set to  0.000000
6/4/2010	9:40:09 AM	BCl3 MFC set to  0.000000
6/4/2010	9:40:09 AM	PHl3 MFC set to  0.000000
6/4/2010	9:40:09 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:40:09 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:40:09 AM	Tube furnace set to 0
6/4/2010	9:41:09 AM	H2 valve closed
6/4/2010	9:41:09 AM	BCl3 valve closed
6/4/2010	9:41:09 AM	PH3 valve closed
6/4/2010	9:41:09 AM	SiCl4 pre valve closed
6/4/2010	9:41:09 AM	SiCl4 post valve closed
6/4/2010	9:41:09 AM	Bubbler valve closed
6/4/2010	9:41:09 AM	Helium valve opened
6/4/2010	9:41:09 AM	Main Vac valve opened
6/4/2010	9:41:09 AM	Bypass valve opened
6/4/2010	9:41:09 AM	Helium MFC set to  500.000000
6/4/2010	9:41:09 AM	H2 MFC set to  0.000000
6/4/2010	9:41:09 AM	BCl3 MFC set to  0.000000
6/4/2010	9:41:09 AM	PHl3 MFC set to  0.000000
6/4/2010	9:41:09 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:41:09 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:41:10 AM	Tube furnace set to 0
6/4/2010	9:42:10 AM	Helium valve closed
6/4/2010	9:42:10 AM	H2 valve closed
6/4/2010	9:42:10 AM	BCl3 valve closed
6/4/2010	9:42:10 AM	PH3 valve closed
6/4/2010	9:42:10 AM	SiCl4 pre valve closed
6/4/2010	9:42:10 AM	SiCl4 post valve closed
6/4/2010	9:42:10 AM	Bubbler valve closed
6/4/2010	9:42:10 AM	Main Vac valve opened
6/4/2010	9:42:10 AM	Bypass valve opened
6/4/2010	9:42:10 AM	Helium MFC set to  0.000000
6/4/2010	9:42:10 AM	H2 MFC set to  0.000000
6/4/2010	9:42:10 AM	BCl3 MFC set to  0.000000
6/4/2010	9:42:10 AM	PHl3 MFC set to  0.000000
6/4/2010	9:42:10 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:42:10 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:42:10 AM	Tube furnace set to 0
6/4/2010	9:43:10 AM	H2 valve closed
6/4/2010	9:43:10 AM	BCl3 valve closed
6/4/2010	9:43:10 AM	PH3 valve closed
6/4/2010	9:43:10 AM	SiCl4 pre valve closed
6/4/2010	9:43:10 AM	SiCl4 post valve closed
6/4/2010	9:43:10 AM	Bubbler valve closed
6/4/2010	9:43:10 AM	Helium valve opened
6/4/2010	9:43:10 AM	Main Vac valve opened
6/4/2010	9:43:10 AM	Bypass valve opened
6/4/2010	9:43:10 AM	Helium MFC set to  500.000000
6/4/2010	9:43:10 AM	H2 MFC set to  0.000000
6/4/2010	9:43:10 AM	BCl3 MFC set to  0.000000
6/4/2010	9:43:10 AM	PHl3 MFC set to  0.000000
6/4/2010	9:43:10 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:43:10 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:43:10 AM	Tube furnace set to 0
6/4/2010	9:44:10 AM	Helium valve closed
6/4/2010	9:44:10 AM	H2 valve closed
6/4/2010	9:44:10 AM	BCl3 valve closed
6/4/2010	9:44:10 AM	PH3 valve closed
6/4/2010	9:44:10 AM	SiCl4 pre valve closed
6/4/2010	9:44:10 AM	SiCl4 post valve closed
6/4/2010	9:44:10 AM	Bubbler valve closed
6/4/2010	9:44:10 AM	Main Vac valve opened
6/4/2010	9:44:10 AM	Bypass valve opened
6/4/2010	9:44:10 AM	Helium MFC set to  0.000000
6/4/2010	9:44:10 AM	H2 MFC set to  0.000000
6/4/2010	9:44:10 AM	BCl3 MFC set to  0.000000
6/4/2010	9:44:10 AM	PHl3 MFC set to  0.000000
6/4/2010	9:44:10 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:44:10 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:44:10 AM	Tube furnace set to 0
6/4/2010	9:44:11 AM	Run finished at 9:44 AM
6/4/2010	9:49:31 AM	Recipe started at 9:49 AM
6/4/2010	9:49:31 AM	Helium valve closed
6/4/2010	9:49:31 AM	H2 valve closed
6/4/2010	9:49:31 AM	BCl3 valve closed
6/4/2010	9:49:31 AM	PH3 valve closed
6/4/2010	9:49:31 AM	SiCl4 pre valve closed
6/4/2010	9:49:31 AM	SiCl4 post valve closed
6/4/2010	9:49:31 AM	Main Vac valve closed
6/4/2010	9:49:31 AM	Bubbler valve closed
6/4/2010	9:49:31 AM	Bypass valve opened
6/4/2010	9:49:31 AM	Helium MFC set to  0.000000
6/4/2010	9:49:31 AM	H2 MFC set to  0.000000
6/4/2010	9:49:31 AM	BCl3 MFC set to  0.000000
6/4/2010	9:49:31 AM	PHl3 MFC set to  0.000000
6/4/2010	9:49:31 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:49:31 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:49:31 AM	Tube furnace set to 0
6/4/2010	9:49:32 AM	Helium valve closed
6/4/2010	9:49:32 AM	H2 valve closed
6/4/2010	9:49:32 AM	BCl3 valve closed
6/4/2010	9:49:32 AM	PH3 valve closed
6/4/2010	9:49:32 AM	SiCl4 pre valve closed
6/4/2010	9:49:32 AM	SiCl4 post valve closed
6/4/2010	9:49:32 AM	Bubbler valve closed
6/4/2010	9:49:32 AM	Main Vac valve opened
6/4/2010	9:49:32 AM	Bypass valve opened
6/4/2010	9:49:32 AM	Helium MFC set to  0.000000
6/4/2010	9:49:32 AM	H2 MFC set to  0.000000
6/4/2010	9:49:32 AM	BCl3 MFC set to  0.000000
6/4/2010	9:49:32 AM	PHl3 MFC set to  0.000000
6/4/2010	9:49:32 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:49:32 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:49:32 AM	Tube furnace set to 0
6/4/2010	9:50:32 AM	H2 valve closed
6/4/2010	9:50:32 AM	BCl3 valve closed
6/4/2010	9:50:32 AM	PH3 valve closed
6/4/2010	9:50:32 AM	SiCl4 pre valve closed
6/4/2010	9:50:32 AM	SiCl4 post valve closed
6/4/2010	9:50:32 AM	Bubbler valve closed
6/4/2010	9:50:32 AM	Helium valve opened
6/4/2010	9:50:32 AM	Main Vac valve opened
6/4/2010	9:50:32 AM	Bypass valve opened
6/4/2010	9:50:32 AM	Helium MFC set to  500.000000
6/4/2010	9:50:32 AM	H2 MFC set to  0.000000
6/4/2010	9:50:32 AM	BCl3 MFC set to  0.000000
6/4/2010	9:50:32 AM	PHl3 MFC set to  0.000000
6/4/2010	9:50:32 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:50:32 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:50:32 AM	Tube furnace set to 0
6/4/2010	9:51:32 AM	Helium valve closed
6/4/2010	9:51:32 AM	H2 valve closed
6/4/2010	9:51:32 AM	BCl3 valve closed
6/4/2010	9:51:32 AM	PH3 valve closed
6/4/2010	9:51:32 AM	SiCl4 pre valve closed
6/4/2010	9:51:32 AM	SiCl4 post valve closed
6/4/2010	9:51:32 AM	Bubbler valve closed
6/4/2010	9:51:32 AM	Main Vac valve opened
6/4/2010	9:51:32 AM	Bypass valve opened
6/4/2010	9:51:32 AM	Helium MFC set to  0.000000
6/4/2010	9:51:32 AM	H2 MFC set to  0.000000
6/4/2010	9:51:32 AM	BCl3 MFC set to  0.000000
6/4/2010	9:51:32 AM	PHl3 MFC set to  0.000000
6/4/2010	9:51:32 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:51:32 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:51:32 AM	Tube furnace set to 0
6/4/2010	9:52:32 AM	H2 valve closed
6/4/2010	9:52:32 AM	BCl3 valve closed
6/4/2010	9:52:32 AM	PH3 valve closed
6/4/2010	9:52:32 AM	SiCl4 pre valve closed
6/4/2010	9:52:32 AM	SiCl4 post valve closed
6/4/2010	9:52:32 AM	Bubbler valve closed
6/4/2010	9:52:32 AM	Helium valve opened
6/4/2010	9:52:32 AM	Main Vac valve opened
6/4/2010	9:52:32 AM	Bypass valve opened
6/4/2010	9:52:32 AM	Helium MFC set to  500.000000
6/4/2010	9:52:32 AM	H2 MFC set to  0.000000
6/4/2010	9:52:32 AM	BCl3 MFC set to  0.000000
6/4/2010	9:52:32 AM	PHl3 MFC set to  0.000000
6/4/2010	9:52:32 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:52:32 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:52:32 AM	Tube furnace set to 0
6/4/2010	9:53:32 AM	Helium valve closed
6/4/2010	9:53:32 AM	H2 valve closed
6/4/2010	9:53:32 AM	BCl3 valve closed
6/4/2010	9:53:32 AM	PH3 valve closed
6/4/2010	9:53:32 AM	SiCl4 pre valve closed
6/4/2010	9:53:33 AM	SiCl4 post valve closed
6/4/2010	9:53:33 AM	Bubbler valve closed
6/4/2010	9:53:33 AM	Main Vac valve opened
6/4/2010	9:53:33 AM	Bypass valve opened
6/4/2010	9:53:33 AM	Helium MFC set to  0.000000
6/4/2010	9:53:33 AM	H2 MFC set to  0.000000
6/4/2010	9:53:33 AM	BCl3 MFC set to  0.000000
6/4/2010	9:53:33 AM	PHl3 MFC set to  0.000000
6/4/2010	9:53:33 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:53:33 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:53:33 AM	Tube furnace set to 0
6/4/2010	9:54:33 AM	H2 valve closed
6/4/2010	9:54:33 AM	BCl3 valve closed
6/4/2010	9:54:33 AM	PH3 valve closed
6/4/2010	9:54:33 AM	SiCl4 pre valve closed
6/4/2010	9:54:33 AM	SiCl4 post valve closed
6/4/2010	9:54:33 AM	Bubbler valve closed
6/4/2010	9:54:33 AM	Helium valve opened
6/4/2010	9:54:33 AM	Main Vac valve opened
6/4/2010	9:54:33 AM	Bypass valve opened
6/4/2010	9:54:33 AM	Helium MFC set to  500.000000
6/4/2010	9:54:33 AM	H2 MFC set to  0.000000
6/4/2010	9:54:33 AM	BCl3 MFC set to  0.000000
6/4/2010	9:54:33 AM	PHl3 MFC set to  0.000000
6/4/2010	9:54:33 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:54:33 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:54:33 AM	Tube furnace set to 0
6/4/2010	9:55:33 AM	Helium valve closed
6/4/2010	9:55:33 AM	H2 valve closed
6/4/2010	9:55:33 AM	BCl3 valve closed
6/4/2010	9:55:33 AM	PH3 valve closed
6/4/2010	9:55:33 AM	SiCl4 pre valve closed
6/4/2010	9:55:33 AM	SiCl4 post valve closed
6/4/2010	9:55:33 AM	Bubbler valve closed
6/4/2010	9:55:33 AM	Main Vac valve opened
6/4/2010	9:55:33 AM	Bypass valve opened
6/4/2010	9:55:33 AM	Helium MFC set to  0.000000
6/4/2010	9:55:33 AM	H2 MFC set to  0.000000
6/4/2010	9:55:33 AM	BCl3 MFC set to  0.000000
6/4/2010	9:55:33 AM	PHl3 MFC set to  0.000000
6/4/2010	9:55:33 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:55:33 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:55:33 AM	Tube furnace set to 0
6/4/2010	9:56:33 AM	H2 valve closed
6/4/2010	9:56:33 AM	BCl3 valve closed
6/4/2010	9:56:33 AM	PH3 valve closed
6/4/2010	9:56:33 AM	SiCl4 pre valve closed
6/4/2010	9:56:33 AM	SiCl4 post valve closed
6/4/2010	9:56:33 AM	Bubbler valve closed
6/4/2010	9:56:33 AM	Helium valve opened
6/4/2010	9:56:33 AM	Main Vac valve opened
6/4/2010	9:56:33 AM	Bypass valve opened
6/4/2010	9:56:33 AM	Helium MFC set to  500.000000
6/4/2010	9:56:33 AM	H2 MFC set to  0.000000
6/4/2010	9:56:33 AM	BCl3 MFC set to  0.000000
6/4/2010	9:56:33 AM	PHl3 MFC set to  0.000000
6/4/2010	9:56:33 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:56:33 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:56:33 AM	Tube furnace set to 0
6/4/2010	9:57:33 AM	Helium valve closed
6/4/2010	9:57:33 AM	H2 valve closed
6/4/2010	9:57:33 AM	BCl3 valve closed
6/4/2010	9:57:33 AM	PH3 valve closed
6/4/2010	9:57:33 AM	SiCl4 pre valve closed
6/4/2010	9:57:33 AM	SiCl4 post valve closed
6/4/2010	9:57:33 AM	Bubbler valve closed
6/4/2010	9:57:33 AM	Main Vac valve opened
6/4/2010	9:57:33 AM	Bypass valve opened
6/4/2010	9:57:33 AM	Helium MFC set to  0.000000
6/4/2010	9:57:33 AM	H2 MFC set to  0.000000
6/4/2010	9:57:33 AM	BCl3 MFC set to  0.000000
6/4/2010	9:57:33 AM	PHl3 MFC set to  0.000000
6/4/2010	9:57:33 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:57:33 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:57:33 AM	Tube furnace set to 0
6/4/2010	9:58:33 AM	H2 valve closed
6/4/2010	9:58:33 AM	BCl3 valve closed
6/4/2010	9:58:33 AM	PH3 valve closed
6/4/2010	9:58:33 AM	SiCl4 pre valve closed
6/4/2010	9:58:33 AM	SiCl4 post valve closed
6/4/2010	9:58:33 AM	Bubbler valve closed
6/4/2010	9:58:33 AM	Helium valve opened
6/4/2010	9:58:33 AM	Main Vac valve opened
6/4/2010	9:58:33 AM	Bypass valve opened
6/4/2010	9:58:33 AM	Helium MFC set to  500.000000
6/4/2010	9:58:33 AM	H2 MFC set to  0.000000
6/4/2010	9:58:33 AM	BCl3 MFC set to  0.000000
6/4/2010	9:58:33 AM	PHl3 MFC set to  0.000000
6/4/2010	9:58:33 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:58:33 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:58:34 AM	Tube furnace set to 0
6/4/2010	9:59:34 AM	Helium valve closed
6/4/2010	9:59:34 AM	H2 valve closed
6/4/2010	9:59:34 AM	BCl3 valve closed
6/4/2010	9:59:34 AM	PH3 valve closed
6/4/2010	9:59:34 AM	SiCl4 pre valve closed
6/4/2010	9:59:34 AM	SiCl4 post valve closed
6/4/2010	9:59:34 AM	Bubbler valve closed
6/4/2010	9:59:34 AM	Main Vac valve opened
6/4/2010	9:59:34 AM	Bypass valve opened
6/4/2010	9:59:34 AM	Helium MFC set to  0.000000
6/4/2010	9:59:34 AM	H2 MFC set to  0.000000
6/4/2010	9:59:34 AM	BCl3 MFC set to  0.000000
6/4/2010	9:59:34 AM	PHl3 MFC set to  0.000000
6/4/2010	9:59:34 AM	SiCl4 MFC set to  0.000000
6/4/2010	9:59:34 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	9:59:34 AM	Tube furnace set to 0
6/4/2010	9:59:35 AM	Run finished at 9:59 AM
6/4/2010	10:04:09 AM	Helium MFC set to  500.000000
6/4/2010	10:04:10 AM	Helium valve opened
6/4/2010	10:18:13 AM	Helium MFC set to  0.000000
6/4/2010	10:18:14 AM	Helium valve closed
6/4/2010	10:18:54 AM	Bypass valve closed
6/4/2010	10:18:54 AM	Main Vac valve closed
6/4/2010	10:19:03 AM	Main Vac valve opened
6/4/2010	10:19:04 AM	Bypass valve opened
6/4/2010	10:19:27 AM	Recipe started at 10:19 AM
6/4/2010	10:19:27 AM	Helium valve closed
6/4/2010	10:19:27 AM	BCl3 valve closed
6/4/2010	10:19:27 AM	PH3 valve closed
6/4/2010	10:19:27 AM	SiCl4 pre valve closed
6/4/2010	10:19:27 AM	SiCl4 post valve closed
6/4/2010	10:19:27 AM	Main Vac valve closed
6/4/2010	10:19:27 AM	Bypass valve closed
6/4/2010	10:19:27 AM	Bubbler valve closed
6/4/2010	10:19:27 AM	H2 valve opened
6/4/2010	10:19:27 AM	Helium MFC set to  0.000000
6/4/2010	10:19:27 AM	H2 MFC set to  500.000000
6/4/2010	10:19:27 AM	BCl3 MFC set to  0.000000
6/4/2010	10:19:27 AM	PHl3 MFC set to  0.000000
6/4/2010	10:19:27 AM	SiCl4 MFC set to  0.000000
6/4/2010	10:19:27 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	10:19:27 AM	Tube furnace set to 0
6/4/2010	10:20:47 AM	Helium valve closed
6/4/2010	10:20:47 AM	BCl3 valve closed
6/4/2010	10:20:47 AM	PH3 valve closed
6/4/2010	10:20:47 AM	SiCl4 pre valve closed
6/4/2010	10:20:47 AM	SiCl4 post valve closed
6/4/2010	10:20:47 AM	Main Vac valve closed
6/4/2010	10:20:47 AM	Bypass valve closed
6/4/2010	10:20:47 AM	H2 valve opened
6/4/2010	10:20:47 AM	Bubbler valve opened
6/4/2010	10:20:47 AM	Helium MFC set to  0.000000
6/4/2010	10:20:47 AM	H2 MFC set to  500.000000
6/4/2010	10:20:47 AM	BCl3 MFC set to  0.000000
6/4/2010	10:20:47 AM	PHl3 MFC set to  0.000000
6/4/2010	10:20:47 AM	SiCl4 MFC set to  0.000000
6/4/2010	10:20:47 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	10:20:47 AM	Tube furnace set to 1000
6/4/2010	10:40:47 AM	Helium valve closed
6/4/2010	10:40:47 AM	PH3 valve closed
6/4/2010	10:40:47 AM	Main Vac valve closed
6/4/2010	10:40:47 AM	Bypass valve closed
6/4/2010	10:40:47 AM	H2 valve opened
6/4/2010	10:40:47 AM	BCl3 valve opened
6/4/2010	10:40:47 AM	SiCl4 pre valve opened
6/4/2010	10:40:47 AM	SiCl4 post valve opened
6/4/2010	10:40:47 AM	Bubbler valve opened
6/4/2010	10:40:47 AM	Helium MFC set to  0.000000
6/4/2010	10:40:47 AM	H2 MFC set to  500.000000
6/4/2010	10:40:47 AM	BCl3 MFC set to  35.000000
6/4/2010	10:40:47 AM	PHl3 MFC set to  0.000000
6/4/2010	10:40:47 AM	SiCl4 MFC set to  50.000000
6/4/2010	10:40:47 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	10:40:47 AM	Tube furnace set to 1000
6/4/2010	10:55:47 AM	H2 valve closed
6/4/2010	10:55:47 AM	BCl3 valve closed
6/4/2010	10:55:47 AM	PH3 valve closed
6/4/2010	10:55:47 AM	SiCl4 pre valve closed
6/4/2010	10:55:47 AM	SiCl4 post valve closed
6/4/2010	10:55:47 AM	Main Vac valve closed
6/4/2010	10:55:47 AM	Bypass valve closed
6/4/2010	10:55:47 AM	Helium valve opened
6/4/2010	10:55:47 AM	Bubbler valve opened
6/4/2010	10:55:47 AM	Helium MFC set to  500.000000
6/4/2010	10:55:47 AM	H2 MFC set to  0.000000
6/4/2010	10:55:47 AM	BCl3 MFC set to  0.000000
6/4/2010	10:55:47 AM	PHl3 MFC set to  0.000000
6/4/2010	10:55:47 AM	SiCl4 MFC set to  0.000000
6/4/2010	10:55:47 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	10:55:47 AM	Tube furnace set to 0
6/4/2010	11:15:47 AM	Helium valve closed
6/4/2010	11:15:47 AM	H2 valve closed
6/4/2010	11:15:47 AM	BCl3 valve closed
6/4/2010	11:15:47 AM	PH3 valve closed
6/4/2010	11:15:47 AM	SiCl4 pre valve closed
6/4/2010	11:15:47 AM	SiCl4 post valve closed
6/4/2010	11:15:47 AM	Main Vac valve closed
6/4/2010	11:15:47 AM	Bypass valve closed
6/4/2010	11:15:47 AM	Bubbler valve closed
6/4/2010	11:15:47 AM	Helium MFC set to  0.000000
6/4/2010	11:15:47 AM	H2 MFC set to  0.000000
6/4/2010	11:15:47 AM	BCl3 MFC set to  0.000000
6/4/2010	11:15:47 AM	PHl3 MFC set to  0.000000
6/4/2010	11:15:47 AM	SiCl4 MFC set to  0.000000
6/4/2010	11:15:47 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	11:15:47 AM	Tube furnace set to 0
6/4/2010	11:15:48 AM	Run finished at 11:15 AM
6/4/2010	11:32:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/4/2010	11:32:18 AM	Recipe started at 11:32 AM
6/4/2010	11:32:18 AM	Helium valve closed
6/4/2010	11:32:18 AM	H2 valve closed
6/4/2010	11:32:18 AM	BCl3 valve closed
6/4/2010	11:32:18 AM	PH3 valve closed
6/4/2010	11:32:18 AM	SiCl4 pre valve closed
6/4/2010	11:32:18 AM	SiCl4 post valve closed
6/4/2010	11:32:18 AM	Main Vac valve closed
6/4/2010	11:32:18 AM	Bubbler valve closed
6/4/2010	11:32:18 AM	Bypass valve opened
6/4/2010	11:32:18 AM	Helium MFC set to  0.000000
6/4/2010	11:32:18 AM	H2 MFC set to  0.000000
6/4/2010	11:32:18 AM	BCl3 MFC set to  0.000000
6/4/2010	11:32:18 AM	PHl3 MFC set to  0.000000
6/4/2010	11:32:18 AM	SiCl4 MFC set to  0.000000
6/4/2010	11:32:18 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	11:32:18 AM	Tube furnace set to 0
6/4/2010	11:33:07 AM	Helium valve closed
6/4/2010	11:33:07 AM	H2 valve closed
6/4/2010	11:33:07 AM	BCl3 valve closed
6/4/2010	11:33:07 AM	PH3 valve closed
6/4/2010	11:33:07 AM	SiCl4 pre valve closed
6/4/2010	11:33:07 AM	SiCl4 post valve closed
6/4/2010	11:33:07 AM	Bubbler valve closed
6/4/2010	11:33:07 AM	Main Vac valve opened
6/4/2010	11:33:07 AM	Bypass valve opened
6/4/2010	11:33:07 AM	Helium MFC set to  0.000000
6/4/2010	11:33:07 AM	H2 MFC set to  0.000000
6/4/2010	11:33:07 AM	BCl3 MFC set to  0.000000
6/4/2010	11:33:07 AM	PHl3 MFC set to  0.000000
6/4/2010	11:33:07 AM	SiCl4 MFC set to  0.000000
6/4/2010	11:33:07 AM	Bypass solenoid MFC set to  0.000000
6/4/2010	11:33:08 AM	Tube furnace set to 0
6/4/2010	11:33:08 AM	Run finished at 11:33 AM
6/4/2010	11:33:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/4/2010	11:33:25 AM	Helium MFC set to  100.000000
6/4/2010	11:33:27 AM	Helium valve opened
6/4/2010	11:45:30 AM	Helium valve closed
6/4/2010	11:45:34 AM	Helium MFC set to  0.000000
6/4/2010	11:55:38 AM	Helium MFC set to  100.000000
6/4/2010	11:55:39 AM	Helium valve opened
6/4/2010	11:55:49 AM	Helium MFC set to  500.000000
6/4/2010	12:02:57 PM	Helium valve closed
6/4/2010	12:02:59 PM	Helium MFC set to  0.000000
6/4/2010	12:03:49 PM	Helium MFC set to  100.000000
6/4/2010	12:03:49 PM	Helium valve opened
6/4/2010	12:03:52 PM	Helium MFC set to  500.000000
6/4/2010	12:10:34 PM	Helium valve closed
6/4/2010	12:10:37 PM	Helium MFC set to  0.000000
6/4/2010	12:13:49 PM	Helium valve opened
6/4/2010	12:13:54 PM	Helium MFC set to  100.000000
6/4/2010	12:14:03 PM	Helium MFC set to  500.000000
6/4/2010	12:14:20 PM	Helium MFC set to  500.000000
6/4/2010	12:14:21 PM	Helium MFC set to  500.000000
6/4/2010	12:14:22 PM	Helium valve closed
6/4/2010	12:14:24 PM	Helium MFC set to  0.000000
6/4/2010	12:14:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/4/2010	12:14:41 PM	Recipe started at 12:14 PM
6/4/2010	12:14:41 PM	H2 valve closed
6/4/2010	12:14:41 PM	BCl3 valve closed
6/4/2010	12:14:41 PM	PH3 valve closed
6/4/2010	12:14:41 PM	SiCl4 pre valve closed
6/4/2010	12:14:41 PM	SiCl4 post valve closed
6/4/2010	12:14:41 PM	Main Vac valve closed
6/4/2010	12:14:41 PM	Bypass valve closed
6/4/2010	12:14:41 PM	Bubbler valve closed
6/4/2010	12:14:41 PM	Helium valve opened
6/4/2010	12:14:41 PM	Helium MFC set to  500.000000
6/4/2010	12:14:41 PM	H2 MFC set to  0.000000
6/4/2010	12:14:41 PM	BCl3 MFC set to  0.000000
6/4/2010	12:14:41 PM	PHl3 MFC set to  0.000000
6/4/2010	12:14:41 PM	SiCl4 MFC set to  0.000000
6/4/2010	12:14:41 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	12:14:41 PM	Tube furnace set to 0
6/4/2010	12:16:01 PM	Helium valve closed
6/4/2010	12:16:01 PM	H2 valve closed
6/4/2010	12:16:01 PM	BCl3 valve closed
6/4/2010	12:16:01 PM	PH3 valve closed
6/4/2010	12:16:01 PM	SiCl4 pre valve closed
6/4/2010	12:16:01 PM	SiCl4 post valve closed
6/4/2010	12:16:01 PM	Main Vac valve closed
6/4/2010	12:16:01 PM	Bypass valve closed
6/4/2010	12:16:01 PM	Bubbler valve closed
6/4/2010	12:16:01 PM	Helium MFC set to  0.000000
6/4/2010	12:16:01 PM	H2 MFC set to  0.000000
6/4/2010	12:16:01 PM	BCl3 MFC set to  0.000000
6/4/2010	12:16:01 PM	PHl3 MFC set to  0.000000
6/4/2010	12:16:01 PM	SiCl4 MFC set to  0.000000
6/4/2010	12:16:01 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	12:16:01 PM	Tube furnace set to 0
6/4/2010	12:16:16 PM	Helium valve closed
6/4/2010	12:16:16 PM	H2 valve closed
6/4/2010	12:16:16 PM	BCl3 valve closed
6/4/2010	12:16:16 PM	PH3 valve closed
6/4/2010	12:16:16 PM	SiCl4 pre valve closed
6/4/2010	12:16:16 PM	SiCl4 post valve closed
6/4/2010	12:16:16 PM	Main Vac valve closed
6/4/2010	12:16:16 PM	Bubbler valve closed
6/4/2010	12:16:16 PM	Bypass valve opened
6/4/2010	12:16:16 PM	Helium MFC set to  0.000000
6/4/2010	12:16:16 PM	H2 MFC set to  0.000000
6/4/2010	12:16:16 PM	BCl3 MFC set to  0.000000
6/4/2010	12:16:16 PM	PHl3 MFC set to  0.000000
6/4/2010	12:16:16 PM	SiCl4 MFC set to  0.000000
6/4/2010	12:16:16 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	12:16:17 PM	Tube furnace set to 0
6/4/2010	12:16:49 PM	Helium valve closed
6/4/2010	12:16:49 PM	H2 valve closed
6/4/2010	12:16:49 PM	BCl3 valve closed
6/4/2010	12:16:49 PM	PH3 valve closed
6/4/2010	12:16:49 PM	SiCl4 pre valve closed
6/4/2010	12:16:49 PM	SiCl4 post valve closed
6/4/2010	12:16:49 PM	Bubbler valve closed
6/4/2010	12:16:49 PM	Main Vac valve opened
6/4/2010	12:16:49 PM	Bypass valve opened
6/4/2010	12:16:49 PM	Helium MFC set to  0.000000
6/4/2010	12:16:49 PM	H2 MFC set to  0.000000
6/4/2010	12:16:49 PM	BCl3 MFC set to  0.000000
6/4/2010	12:16:49 PM	PHl3 MFC set to  0.000000
6/4/2010	12:16:49 PM	SiCl4 MFC set to  0.000000
6/4/2010	12:16:49 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	12:16:49 PM	Tube furnace set to 0
6/4/2010	12:21:49 PM	H2 valve closed
6/4/2010	12:21:49 PM	BCl3 valve closed
6/4/2010	12:21:49 PM	PH3 valve closed
6/4/2010	12:21:49 PM	SiCl4 pre valve closed
6/4/2010	12:21:49 PM	SiCl4 post valve closed
6/4/2010	12:21:49 PM	Main Vac valve closed
6/4/2010	12:21:49 PM	Bypass valve closed
6/4/2010	12:21:49 PM	Bubbler valve closed
6/4/2010	12:21:49 PM	Helium valve opened
6/4/2010	12:21:49 PM	Helium MFC set to  500.000000
6/4/2010	12:21:49 PM	H2 MFC set to  0.000000
6/4/2010	12:21:49 PM	BCl3 MFC set to  0.000000
6/4/2010	12:21:49 PM	PHl3 MFC set to  0.000000
6/4/2010	12:21:49 PM	SiCl4 MFC set to  0.000000
6/4/2010	12:21:49 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	12:21:49 PM	Tube furnace set to 0
6/4/2010	12:23:09 PM	Helium valve closed
6/4/2010	12:23:09 PM	H2 valve closed
6/4/2010	12:23:09 PM	BCl3 valve closed
6/4/2010	12:23:09 PM	PH3 valve closed
6/4/2010	12:23:09 PM	SiCl4 pre valve closed
6/4/2010	12:23:09 PM	SiCl4 post valve closed
6/4/2010	12:23:09 PM	Main Vac valve closed
6/4/2010	12:23:09 PM	Bypass valve closed
6/4/2010	12:23:09 PM	Bubbler valve closed
6/4/2010	12:23:09 PM	Helium MFC set to  0.000000
6/4/2010	12:23:09 PM	H2 MFC set to  0.000000
6/4/2010	12:23:09 PM	BCl3 MFC set to  0.000000
6/4/2010	12:23:09 PM	PHl3 MFC set to  0.000000
6/4/2010	12:23:09 PM	SiCl4 MFC set to  0.000000
6/4/2010	12:23:09 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	12:23:09 PM	Tube furnace set to 0
6/4/2010	12:23:24 PM	Helium valve closed
6/4/2010	12:23:24 PM	H2 valve closed
6/4/2010	12:23:24 PM	BCl3 valve closed
6/4/2010	12:23:24 PM	PH3 valve closed
6/4/2010	12:23:24 PM	SiCl4 pre valve closed
6/4/2010	12:23:24 PM	SiCl4 post valve closed
6/4/2010	12:23:24 PM	Main Vac valve closed
6/4/2010	12:23:24 PM	Bubbler valve closed
6/4/2010	12:23:24 PM	Bypass valve opened
6/4/2010	12:23:24 PM	Helium MFC set to  0.000000
6/4/2010	12:23:24 PM	H2 MFC set to  0.000000
6/4/2010	12:23:24 PM	BCl3 MFC set to  0.000000
6/4/2010	12:23:24 PM	PHl3 MFC set to  0.000000
6/4/2010	12:23:24 PM	SiCl4 MFC set to  0.000000
6/4/2010	12:23:24 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	12:23:24 PM	Tube furnace set to 0
6/4/2010	12:23:57 PM	Helium valve closed
6/4/2010	12:23:57 PM	H2 valve closed
6/4/2010	12:23:57 PM	BCl3 valve closed
6/4/2010	12:23:57 PM	PH3 valve closed
6/4/2010	12:23:57 PM	SiCl4 pre valve closed
6/4/2010	12:23:57 PM	SiCl4 post valve closed
6/4/2010	12:23:57 PM	Bubbler valve closed
6/4/2010	12:23:57 PM	Main Vac valve opened
6/4/2010	12:23:57 PM	Bypass valve opened
6/4/2010	12:23:57 PM	Helium MFC set to  0.000000
6/4/2010	12:23:57 PM	H2 MFC set to  0.000000
6/4/2010	12:23:57 PM	BCl3 MFC set to  0.000000
6/4/2010	12:23:57 PM	PHl3 MFC set to  0.000000
6/4/2010	12:23:57 PM	SiCl4 MFC set to  0.000000
6/4/2010	12:23:57 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	12:23:57 PM	Tube furnace set to 0
6/4/2010	12:28:57 PM	H2 valve closed
6/4/2010	12:28:57 PM	BCl3 valve closed
6/4/2010	12:28:57 PM	PH3 valve closed
6/4/2010	12:28:57 PM	SiCl4 pre valve closed
6/4/2010	12:28:57 PM	SiCl4 post valve closed
6/4/2010	12:28:57 PM	Main Vac valve closed
6/4/2010	12:28:57 PM	Bypass valve closed
6/4/2010	12:28:57 PM	Bubbler valve closed
6/4/2010	12:28:57 PM	Helium valve opened
6/4/2010	12:28:57 PM	Helium MFC set to  500.000000
6/4/2010	12:28:57 PM	H2 MFC set to  0.000000
6/4/2010	12:28:57 PM	BCl3 MFC set to  0.000000
6/4/2010	12:28:57 PM	PHl3 MFC set to  0.000000
6/4/2010	12:28:57 PM	SiCl4 MFC set to  0.000000
6/4/2010	12:28:57 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	12:28:57 PM	Tube furnace set to 0
6/4/2010	12:30:17 PM	Helium valve closed
6/4/2010	12:30:17 PM	H2 valve closed
6/4/2010	12:30:17 PM	BCl3 valve closed
6/4/2010	12:30:17 PM	PH3 valve closed
6/4/2010	12:30:17 PM	SiCl4 pre valve closed
6/4/2010	12:30:17 PM	SiCl4 post valve closed
6/4/2010	12:30:17 PM	Main Vac valve closed
6/4/2010	12:30:17 PM	Bypass valve closed
6/4/2010	12:30:17 PM	Bubbler valve closed
6/4/2010	12:30:17 PM	Helium MFC set to  0.000000
6/4/2010	12:30:17 PM	H2 MFC set to  0.000000
6/4/2010	12:30:17 PM	BCl3 MFC set to  0.000000
6/4/2010	12:30:17 PM	PHl3 MFC set to  0.000000
6/4/2010	12:30:17 PM	SiCl4 MFC set to  0.000000
6/4/2010	12:30:17 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	12:30:17 PM	Tube furnace set to 0
6/4/2010	12:30:32 PM	Helium valve closed
6/4/2010	12:30:32 PM	H2 valve closed
6/4/2010	12:30:32 PM	BCl3 valve closed
6/4/2010	12:30:32 PM	PH3 valve closed
6/4/2010	12:30:32 PM	SiCl4 pre valve closed
6/4/2010	12:30:32 PM	SiCl4 post valve closed
6/4/2010	12:30:32 PM	Main Vac valve closed
6/4/2010	12:30:32 PM	Bubbler valve closed
6/4/2010	12:30:32 PM	Bypass valve opened
6/4/2010	12:30:32 PM	Helium MFC set to  0.000000
6/4/2010	12:30:32 PM	H2 MFC set to  0.000000
6/4/2010	12:30:32 PM	BCl3 MFC set to  0.000000
6/4/2010	12:30:32 PM	PHl3 MFC set to  0.000000
6/4/2010	12:30:32 PM	SiCl4 MFC set to  0.000000
6/4/2010	12:30:32 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	12:30:32 PM	Tube furnace set to 0
6/4/2010	12:31:05 PM	Helium valve closed
6/4/2010	12:31:05 PM	H2 valve closed
6/4/2010	12:31:05 PM	BCl3 valve closed
6/4/2010	12:31:05 PM	PH3 valve closed
6/4/2010	12:31:05 PM	SiCl4 pre valve closed
6/4/2010	12:31:05 PM	SiCl4 post valve closed
6/4/2010	12:31:05 PM	Bubbler valve closed
6/4/2010	12:31:05 PM	Main Vac valve opened
6/4/2010	12:31:05 PM	Bypass valve opened
6/4/2010	12:31:05 PM	Helium MFC set to  0.000000
6/4/2010	12:31:05 PM	H2 MFC set to  0.000000
6/4/2010	12:31:05 PM	BCl3 MFC set to  0.000000
6/4/2010	12:31:05 PM	PHl3 MFC set to  0.000000
6/4/2010	12:31:05 PM	SiCl4 MFC set to  0.000000
6/4/2010	12:31:05 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	12:31:05 PM	Tube furnace set to 0
6/4/2010	12:36:05 PM	Helium valve closed
6/4/2010	12:36:05 PM	H2 valve closed
6/4/2010	12:36:05 PM	BCl3 valve closed
6/4/2010	12:36:05 PM	PH3 valve closed
6/4/2010	12:36:05 PM	SiCl4 pre valve closed
6/4/2010	12:36:05 PM	SiCl4 post valve closed
6/4/2010	12:36:05 PM	Bubbler valve closed
6/4/2010	12:36:05 PM	Main Vac valve opened
6/4/2010	12:36:05 PM	Bypass valve opened
6/4/2010	12:36:05 PM	Helium MFC set to  0.000000
6/4/2010	12:36:05 PM	H2 MFC set to  0.000000
6/4/2010	12:36:05 PM	BCl3 MFC set to  0.000000
6/4/2010	12:36:05 PM	PHl3 MFC set to  0.000000
6/4/2010	12:36:05 PM	SiCl4 MFC set to  0.000000
6/4/2010	12:36:05 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	12:36:05 PM	Tube furnace set to 0
6/4/2010	12:36:06 PM	Run finished at 12:36 PM
6/4/2010	12:36:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/4/2010	1:28:27 PM	Recipe started at 1:28 PM
6/4/2010	1:28:27 PM	Helium valve closed
6/4/2010	1:28:27 PM	BCl3 valve closed
6/4/2010	1:28:27 PM	PH3 valve closed
6/4/2010	1:28:27 PM	SiCl4 pre valve closed
6/4/2010	1:28:27 PM	SiCl4 post valve closed
6/4/2010	1:28:27 PM	Main Vac valve closed
6/4/2010	1:28:27 PM	Bypass valve closed
6/4/2010	1:28:27 PM	Bubbler valve closed
6/4/2010	1:28:27 PM	H2 valve opened
6/4/2010	1:28:27 PM	Helium MFC set to  0.000000
6/4/2010	1:28:27 PM	H2 MFC set to  500.000000
6/4/2010	1:28:27 PM	BCl3 MFC set to  0.000000
6/4/2010	1:28:27 PM	PHl3 MFC set to  0.000000
6/4/2010	1:28:27 PM	SiCl4 MFC set to  0.000000
6/4/2010	1:28:27 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	1:28:27 PM	Tube furnace set to 1000
6/4/2010	1:29:47 PM	Helium valve closed
6/4/2010	1:29:47 PM	BCl3 valve closed
6/4/2010	1:29:47 PM	PH3 valve closed
6/4/2010	1:29:47 PM	SiCl4 pre valve closed
6/4/2010	1:29:47 PM	SiCl4 post valve closed
6/4/2010	1:29:47 PM	Main Vac valve closed
6/4/2010	1:29:47 PM	Bypass valve closed
6/4/2010	1:29:47 PM	H2 valve opened
6/4/2010	1:29:47 PM	Bubbler valve opened
6/4/2010	1:29:47 PM	Helium MFC set to  0.000000
6/4/2010	1:29:47 PM	H2 MFC set to  500.000000
6/4/2010	1:29:47 PM	BCl3 MFC set to  0.000000
6/4/2010	1:29:47 PM	PHl3 MFC set to  0.000000
6/4/2010	1:29:47 PM	SiCl4 MFC set to  0.000000
6/4/2010	1:29:47 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	1:29:47 PM	Tube furnace set to 1000
6/4/2010	1:49:47 PM	Helium valve closed
6/4/2010	1:49:47 PM	PH3 valve closed
6/4/2010	1:49:47 PM	Main Vac valve closed
6/4/2010	1:49:47 PM	Bypass valve closed
6/4/2010	1:49:47 PM	H2 valve opened
6/4/2010	1:49:47 PM	BCl3 valve opened
6/4/2010	1:49:47 PM	SiCl4 pre valve opened
6/4/2010	1:49:47 PM	SiCl4 post valve opened
6/4/2010	1:49:47 PM	Bubbler valve opened
6/4/2010	1:49:47 PM	Helium MFC set to  0.000000
6/4/2010	1:49:47 PM	H2 MFC set to  500.000000
6/4/2010	1:49:47 PM	BCl3 MFC set to  35.000000
6/4/2010	1:49:47 PM	PHl3 MFC set to  0.000000
6/4/2010	1:49:47 PM	SiCl4 MFC set to  50.000000
6/4/2010	1:49:47 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	1:49:47 PM	Tube furnace set to 1000
6/4/2010	1:59:47 PM	Helium valve closed
6/4/2010	1:59:47 PM	BCl3 valve closed
6/4/2010	1:59:47 PM	PH3 valve closed
6/4/2010	1:59:47 PM	SiCl4 pre valve closed
6/4/2010	1:59:47 PM	SiCl4 post valve closed
6/4/2010	1:59:47 PM	Main Vac valve closed
6/4/2010	1:59:47 PM	Bypass valve closed
6/4/2010	1:59:47 PM	H2 valve opened
6/4/2010	1:59:47 PM	Bubbler valve opened
6/4/2010	1:59:47 PM	Helium MFC set to  0.000000
6/4/2010	1:59:47 PM	H2 MFC set to  500.000000
6/4/2010	1:59:47 PM	BCl3 MFC set to  0.000000
6/4/2010	1:59:47 PM	PHl3 MFC set to  0.000000
6/4/2010	1:59:47 PM	SiCl4 MFC set to  0.000000
6/4/2010	1:59:47 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	1:59:47 PM	Tube furnace set to 750
6/4/2010	2:19:47 PM	H2 valve closed
6/4/2010	2:19:47 PM	BCl3 valve closed
6/4/2010	2:19:47 PM	PH3 valve closed
6/4/2010	2:19:47 PM	SiCl4 pre valve closed
6/4/2010	2:19:47 PM	SiCl4 post valve closed
6/4/2010	2:19:47 PM	Main Vac valve closed
6/4/2010	2:19:47 PM	Bypass valve closed
6/4/2010	2:19:47 PM	Helium valve opened
6/4/2010	2:19:47 PM	Bubbler valve opened
6/4/2010	2:19:47 PM	Helium MFC set to  500.000000
6/4/2010	2:19:47 PM	H2 MFC set to  0.000000
6/4/2010	2:19:47 PM	BCl3 MFC set to  0.000000
6/4/2010	2:19:47 PM	PHl3 MFC set to  0.000000
6/4/2010	2:19:47 PM	SiCl4 MFC set to  0.000000
6/4/2010	2:19:47 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	2:19:47 PM	Tube furnace set to 0
6/4/2010	2:39:47 PM	Helium valve closed
6/4/2010	2:39:47 PM	H2 valve closed
6/4/2010	2:39:47 PM	BCl3 valve closed
6/4/2010	2:39:47 PM	PH3 valve closed
6/4/2010	2:39:47 PM	SiCl4 pre valve closed
6/4/2010	2:39:47 PM	SiCl4 post valve closed
6/4/2010	2:39:47 PM	Main Vac valve closed
6/4/2010	2:39:47 PM	Bypass valve closed
6/4/2010	2:39:47 PM	Bubbler valve closed
6/4/2010	2:39:47 PM	Helium MFC set to  0.000000
6/4/2010	2:39:47 PM	H2 MFC set to  0.000000
6/4/2010	2:39:47 PM	BCl3 MFC set to  0.000000
6/4/2010	2:39:47 PM	PHl3 MFC set to  0.000000
6/4/2010	2:39:47 PM	SiCl4 MFC set to  0.000000
6/4/2010	2:39:47 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	2:39:48 PM	Tube furnace set to 0
6/4/2010	2:39:48 PM	Run finished at 2:39 PM
6/4/2010	2:50:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/4/2010	2:50:10 PM	Recipe started at 2:50 PM
6/4/2010	2:50:10 PM	Helium valve closed
6/4/2010	2:50:10 PM	H2 valve closed
6/4/2010	2:50:10 PM	BCl3 valve closed
6/4/2010	2:50:10 PM	PH3 valve closed
6/4/2010	2:50:10 PM	SiCl4 pre valve closed
6/4/2010	2:50:10 PM	SiCl4 post valve closed
6/4/2010	2:50:10 PM	Main Vac valve closed
6/4/2010	2:50:10 PM	Bubbler valve closed
6/4/2010	2:50:10 PM	Bypass valve opened
6/4/2010	2:50:10 PM	Helium MFC set to  0.000000
6/4/2010	2:50:10 PM	H2 MFC set to  0.000000
6/4/2010	2:50:10 PM	BCl3 MFC set to  0.000000
6/4/2010	2:50:10 PM	PHl3 MFC set to  0.000000
6/4/2010	2:50:10 PM	SiCl4 MFC set to  0.000000
6/4/2010	2:50:10 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	2:50:10 PM	Tube furnace set to 0
6/4/2010	2:50:59 PM	Helium valve closed
6/4/2010	2:50:59 PM	H2 valve closed
6/4/2010	2:50:59 PM	BCl3 valve closed
6/4/2010	2:50:59 PM	PH3 valve closed
6/4/2010	2:50:59 PM	SiCl4 pre valve closed
6/4/2010	2:50:59 PM	SiCl4 post valve closed
6/4/2010	2:50:59 PM	Bubbler valve closed
6/4/2010	2:50:59 PM	Main Vac valve opened
6/4/2010	2:50:59 PM	Bypass valve opened
6/4/2010	2:50:59 PM	Helium MFC set to  0.000000
6/4/2010	2:50:59 PM	H2 MFC set to  0.000000
6/4/2010	2:50:59 PM	BCl3 MFC set to  0.000000
6/4/2010	2:50:59 PM	PHl3 MFC set to  0.000000
6/4/2010	2:50:59 PM	SiCl4 MFC set to  0.000000
6/4/2010	2:50:59 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	2:50:59 PM	Tube furnace set to 0
6/4/2010	2:50:59 PM	Run finished at 2:50 PM
6/4/2010	2:50:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/4/2010	2:51:35 PM	Helium MFC set to  100.000000
6/4/2010	2:51:36 PM	Helium valve opened
6/4/2010	2:51:43 PM	Helium MFC set to  500.000000
6/4/2010	3:03:17 PM	Helium valve closed
6/4/2010	3:03:20 PM	Helium MFC set to  0.000000
6/4/2010	3:04:01 PM	Helium MFC set to  100.000000
6/4/2010	3:04:03 PM	Helium valve opened
6/4/2010	3:04:13 PM	Helium MFC set to  500.000000
6/4/2010	3:07:43 PM	Helium valve closed
6/4/2010	3:07:52 PM	Helium MFC set to  0.000000
6/4/2010	3:08:26 PM	Helium MFC set to  100.000000
6/4/2010	3:08:28 PM	Helium valve opened
6/4/2010	3:08:40 PM	Helium MFC set to  500.000000
6/4/2010	3:31:11 PM	Helium valve closed
6/4/2010	3:31:14 PM	Helium MFC set to  0.000000
6/4/2010	3:33:53 PM	Recipe started at 3:33 PM
6/4/2010	3:33:53 PM	Helium valve closed
6/4/2010	3:33:53 PM	BCl3 valve closed
6/4/2010	3:33:53 PM	PH3 valve closed
6/4/2010	3:33:53 PM	SiCl4 pre valve closed
6/4/2010	3:33:53 PM	SiCl4 post valve closed
6/4/2010	3:33:53 PM	Main Vac valve closed
6/4/2010	3:33:53 PM	Bypass valve closed
6/4/2010	3:33:53 PM	Bubbler valve closed
6/4/2010	3:33:53 PM	H2 valve opened
6/4/2010	3:33:53 PM	Helium MFC set to  0.000000
6/4/2010	3:33:53 PM	H2 MFC set to  500.000000
6/4/2010	3:33:53 PM	BCl3 MFC set to  0.000000
6/4/2010	3:33:53 PM	PHl3 MFC set to  0.000000
6/4/2010	3:33:53 PM	SiCl4 MFC set to  0.000000
6/4/2010	3:33:53 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	3:33:53 PM	Tube furnace set to 1000
6/4/2010	3:35:12 PM	Helium valve closed
6/4/2010	3:35:12 PM	BCl3 valve closed
6/4/2010	3:35:12 PM	PH3 valve closed
6/4/2010	3:35:12 PM	SiCl4 pre valve closed
6/4/2010	3:35:12 PM	SiCl4 post valve closed
6/4/2010	3:35:12 PM	Main Vac valve closed
6/4/2010	3:35:12 PM	Bypass valve closed
6/4/2010	3:35:12 PM	H2 valve opened
6/4/2010	3:35:12 PM	Bubbler valve opened
6/4/2010	3:35:12 PM	Helium MFC set to  0.000000
6/4/2010	3:35:12 PM	H2 MFC set to  500.000000
6/4/2010	3:35:12 PM	BCl3 MFC set to  0.000000
6/4/2010	3:35:12 PM	PHl3 MFC set to  0.000000
6/4/2010	3:35:12 PM	SiCl4 MFC set to  0.000000
6/4/2010	3:35:12 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	3:35:12 PM	Tube furnace set to 1000
6/4/2010	3:55:12 PM	Helium valve closed
6/4/2010	3:55:12 PM	PH3 valve closed
6/4/2010	3:55:12 PM	Main Vac valve closed
6/4/2010	3:55:12 PM	Bypass valve closed
6/4/2010	3:55:12 PM	H2 valve opened
6/4/2010	3:55:12 PM	BCl3 valve opened
6/4/2010	3:55:12 PM	SiCl4 pre valve opened
6/4/2010	3:55:12 PM	SiCl4 post valve opened
6/4/2010	3:55:12 PM	Bubbler valve opened
6/4/2010	3:55:12 PM	Helium MFC set to  0.000000
6/4/2010	3:55:12 PM	H2 MFC set to  500.000000
6/4/2010	3:55:12 PM	BCl3 MFC set to  35.000000
6/4/2010	3:55:12 PM	PHl3 MFC set to  0.000000
6/4/2010	3:55:12 PM	SiCl4 MFC set to  50.000000
6/4/2010	3:55:12 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	3:55:12 PM	Tube furnace set to 1000
6/4/2010	4:10:12 PM	Helium valve closed
6/4/2010	4:10:12 PM	BCl3 valve closed
6/4/2010	4:10:12 PM	PH3 valve closed
6/4/2010	4:10:12 PM	SiCl4 pre valve closed
6/4/2010	4:10:12 PM	SiCl4 post valve closed
6/4/2010	4:10:12 PM	Main Vac valve closed
6/4/2010	4:10:12 PM	Bypass valve closed
6/4/2010	4:10:12 PM	H2 valve opened
6/4/2010	4:10:12 PM	Bubbler valve opened
6/4/2010	4:10:12 PM	Helium MFC set to  0.000000
6/4/2010	4:10:12 PM	H2 MFC set to  500.000000
6/4/2010	4:10:12 PM	BCl3 MFC set to  0.000000
6/4/2010	4:10:12 PM	PHl3 MFC set to  0.000000
6/4/2010	4:10:12 PM	SiCl4 MFC set to  0.000000
6/4/2010	4:10:12 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	4:10:12 PM	Tube furnace set to 750
6/4/2010	4:30:12 PM	H2 valve closed
6/4/2010	4:30:12 PM	BCl3 valve closed
6/4/2010	4:30:12 PM	PH3 valve closed
6/4/2010	4:30:12 PM	SiCl4 pre valve closed
6/4/2010	4:30:12 PM	SiCl4 post valve closed
6/4/2010	4:30:12 PM	Main Vac valve closed
6/4/2010	4:30:12 PM	Bypass valve closed
6/4/2010	4:30:12 PM	Helium valve opened
6/4/2010	4:30:12 PM	Bubbler valve opened
6/4/2010	4:30:12 PM	Helium MFC set to  500.000000
6/4/2010	4:30:12 PM	H2 MFC set to  0.000000
6/4/2010	4:30:12 PM	BCl3 MFC set to  0.000000
6/4/2010	4:30:12 PM	PHl3 MFC set to  0.000000
6/4/2010	4:30:12 PM	SiCl4 MFC set to  0.000000
6/4/2010	4:30:12 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	4:30:13 PM	Tube furnace set to 0
6/4/2010	4:42:52 PM	Run aborted at 4:42 PM
6/4/2010	4:42:52 PM	Helium valve closed
6/4/2010	4:42:52 PM	H2 valve closed
6/4/2010	4:42:52 PM	BCl3 valve closed
6/4/2010	4:42:52 PM	PH3 valve closed
6/4/2010	4:42:52 PM	SiCl4 pre valve closed
6/4/2010	4:42:52 PM	SiCl4 post valve closed
6/4/2010	4:42:52 PM	Bypass valve closed
6/4/2010	4:42:52 PM	Main Vac valve closed
6/4/2010	4:42:52 PM	Bubbler valve closed
6/4/2010	4:42:52 PM	Helium MFC set to  0.000000
6/4/2010	4:42:52 PM	H2 MFC set to  0.000000
6/4/2010	4:42:52 PM	BCl3 MFC set to  0.000000
6/4/2010	4:42:52 PM	PHl3 MFC set to  0.000000
6/4/2010	4:42:52 PM	SiCl4 MFC set to  0.000000
6/4/2010	4:42:52 PM	Tube furnace set to 0
6/4/2010	5:06:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/4/2010	5:06:09 PM	Recipe started at 5:06 PM
6/4/2010	5:06:09 PM	Helium valve closed
6/4/2010	5:06:09 PM	H2 valve closed
6/4/2010	5:06:09 PM	BCl3 valve closed
6/4/2010	5:06:09 PM	PH3 valve closed
6/4/2010	5:06:09 PM	SiCl4 pre valve closed
6/4/2010	5:06:09 PM	SiCl4 post valve closed
6/4/2010	5:06:09 PM	Main Vac valve closed
6/4/2010	5:06:09 PM	Bubbler valve closed
6/4/2010	5:06:09 PM	Bypass valve opened
6/4/2010	5:06:09 PM	Helium MFC set to  0.000000
6/4/2010	5:06:09 PM	H2 MFC set to  0.000000
6/4/2010	5:06:09 PM	BCl3 MFC set to  0.000000
6/4/2010	5:06:09 PM	PHl3 MFC set to  0.000000
6/4/2010	5:06:09 PM	SiCl4 MFC set to  0.000000
6/4/2010	5:06:09 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	5:06:09 PM	Tube furnace set to 0
6/4/2010	5:06:58 PM	Helium valve closed
6/4/2010	5:06:58 PM	H2 valve closed
6/4/2010	5:06:58 PM	BCl3 valve closed
6/4/2010	5:06:58 PM	PH3 valve closed
6/4/2010	5:06:58 PM	SiCl4 pre valve closed
6/4/2010	5:06:58 PM	SiCl4 post valve closed
6/4/2010	5:06:58 PM	Bubbler valve closed
6/4/2010	5:06:58 PM	Main Vac valve opened
6/4/2010	5:06:58 PM	Bypass valve opened
6/4/2010	5:06:58 PM	Helium MFC set to  0.000000
6/4/2010	5:06:58 PM	H2 MFC set to  0.000000
6/4/2010	5:06:58 PM	BCl3 MFC set to  0.000000
6/4/2010	5:06:58 PM	PHl3 MFC set to  0.000000
6/4/2010	5:06:58 PM	SiCl4 MFC set to  0.000000
6/4/2010	5:06:58 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	5:06:58 PM	Tube furnace set to 0
6/4/2010	5:06:59 PM	Run finished at 5:06 PM
6/4/2010	5:06:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/4/2010	5:07:25 PM	Helium MFC set to  100.000000
6/4/2010	5:07:28 PM	Helium valve opened
6/4/2010	5:07:38 PM	Helium MFC set to  500.000000
6/4/2010	5:08:38 PM	Helium valve closed
6/4/2010	5:08:41 PM	Helium MFC set to  0.000000
6/4/2010	5:09:03 PM	Helium MFC set to  100.000000
6/4/2010	5:09:05 PM	Helium valve opened
6/4/2010	5:09:28 PM	Helium MFC set to  500.000000
6/4/2010	5:13:42 PM	Helium valve closed
6/4/2010	5:13:48 PM	Helium MFC set to  0.000000
6/4/2010	5:14:30 PM	Helium valve opened
6/4/2010	5:14:34 PM	Helium MFC set to  100.000000
6/4/2010	5:14:46 PM	Helium MFC set to  500.000000
6/4/2010	5:15:52 PM	Helium valve closed
6/4/2010	5:15:56 PM	Helium MFC set to  0.000000
6/4/2010	5:16:19 PM	Helium MFC set to  100.000000
6/4/2010	5:16:20 PM	Helium valve opened
6/4/2010	5:16:35 PM	Helium MFC set to  500.000000
6/4/2010	5:27:22 PM	Helium valve closed
6/4/2010	5:27:26 PM	Helium MFC set to  0.000000
6/4/2010	5:27:59 PM	Helium MFC set to  100.000000
6/4/2010	5:28:01 PM	Helium valve opened
6/4/2010	5:28:14 PM	Helium MFC set to  500.000000
6/4/2010	5:31:56 PM	Helium valve closed
6/4/2010	5:31:59 PM	Helium MFC set to  0.000000
6/4/2010	5:32:43 PM	Helium MFC set to  100.000000
6/4/2010	5:32:45 PM	Helium valve opened
6/4/2010	5:32:58 PM	Helium MFC set to  500.000000
6/4/2010	5:40:50 PM	Helium valve closed
6/4/2010	5:40:53 PM	Helium MFC set to  0.000000
6/4/2010	5:41:44 PM	Helium valve opened
6/4/2010	5:41:47 PM	Helium MFC set to  100.000000
6/4/2010	5:41:59 PM	Helium MFC set to  500.000000
6/4/2010	5:47:03 PM	Helium valve closed
6/4/2010	5:47:13 PM	Helium MFC set to  0.000000
6/4/2010	5:48:09 PM	Helium MFC set to  100.000000
6/4/2010	5:48:10 PM	Helium valve opened
6/4/2010	5:48:13 PM	Helium MFC set to  500.000000
6/4/2010	5:49:59 PM	Helium valve closed
6/4/2010	5:50:01 PM	Helium MFC set to  0.000000
6/4/2010	5:51:20 PM	Recipe started at 5:51 PM
6/4/2010	5:51:20 PM	Helium valve closed
6/4/2010	5:51:20 PM	BCl3 valve closed
6/4/2010	5:51:20 PM	PH3 valve closed
6/4/2010	5:51:20 PM	SiCl4 pre valve closed
6/4/2010	5:51:20 PM	SiCl4 post valve closed
6/4/2010	5:51:20 PM	Main Vac valve closed
6/4/2010	5:51:20 PM	Bypass valve closed
6/4/2010	5:51:20 PM	Bubbler valve closed
6/4/2010	5:51:20 PM	H2 valve opened
6/4/2010	5:51:20 PM	Helium MFC set to  0.000000
6/4/2010	5:51:20 PM	H2 MFC set to  500.000000
6/4/2010	5:51:20 PM	BCl3 MFC set to  0.000000
6/4/2010	5:51:20 PM	PHl3 MFC set to  0.000000
6/4/2010	5:51:20 PM	SiCl4 MFC set to  0.000000
6/4/2010	5:51:20 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	5:51:20 PM	Tube furnace set to 1000
6/4/2010	5:52:39 PM	Helium valve closed
6/4/2010	5:52:39 PM	BCl3 valve closed
6/4/2010	5:52:39 PM	PH3 valve closed
6/4/2010	5:52:39 PM	SiCl4 pre valve closed
6/4/2010	5:52:39 PM	SiCl4 post valve closed
6/4/2010	5:52:39 PM	Main Vac valve closed
6/4/2010	5:52:39 PM	Bypass valve closed
6/4/2010	5:52:39 PM	H2 valve opened
6/4/2010	5:52:39 PM	Bubbler valve opened
6/4/2010	5:52:39 PM	Helium MFC set to  0.000000
6/4/2010	5:52:39 PM	H2 MFC set to  500.000000
6/4/2010	5:52:39 PM	BCl3 MFC set to  0.000000
6/4/2010	5:52:39 PM	PHl3 MFC set to  0.000000
6/4/2010	5:52:39 PM	SiCl4 MFC set to  0.000000
6/4/2010	5:52:39 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	5:52:39 PM	Tube furnace set to 1000
6/4/2010	6:12:39 PM	Helium valve closed
6/4/2010	6:12:39 PM	PH3 valve closed
6/4/2010	6:12:39 PM	Main Vac valve closed
6/4/2010	6:12:39 PM	Bypass valve closed
6/4/2010	6:12:39 PM	H2 valve opened
6/4/2010	6:12:39 PM	BCl3 valve opened
6/4/2010	6:12:39 PM	SiCl4 pre valve opened
6/4/2010	6:12:39 PM	SiCl4 post valve opened
6/4/2010	6:12:39 PM	Bubbler valve opened
6/4/2010	6:12:39 PM	Helium MFC set to  0.000000
6/4/2010	6:12:39 PM	H2 MFC set to  500.000000
6/4/2010	6:12:39 PM	BCl3 MFC set to  35.000000
6/4/2010	6:12:39 PM	PHl3 MFC set to  0.000000
6/4/2010	6:12:39 PM	SiCl4 MFC set to  50.000000
6/4/2010	6:12:39 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	6:12:39 PM	Tube furnace set to 1000
6/4/2010	6:17:39 PM	Helium valve closed
6/4/2010	6:17:39 PM	BCl3 valve closed
6/4/2010	6:17:39 PM	PH3 valve closed
6/4/2010	6:17:39 PM	SiCl4 pre valve closed
6/4/2010	6:17:39 PM	SiCl4 post valve closed
6/4/2010	6:17:39 PM	Main Vac valve closed
6/4/2010	6:17:39 PM	Bypass valve closed
6/4/2010	6:17:39 PM	H2 valve opened
6/4/2010	6:17:39 PM	Bubbler valve opened
6/4/2010	6:17:39 PM	Helium MFC set to  0.000000
6/4/2010	6:17:39 PM	H2 MFC set to  500.000000
6/4/2010	6:17:39 PM	BCl3 MFC set to  0.000000
6/4/2010	6:17:39 PM	PHl3 MFC set to  0.000000
6/4/2010	6:17:39 PM	SiCl4 MFC set to  0.000000
6/4/2010	6:17:39 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	6:17:39 PM	Tube furnace set to 750
6/4/2010	6:37:39 PM	H2 valve closed
6/4/2010	6:37:39 PM	BCl3 valve closed
6/4/2010	6:37:39 PM	PH3 valve closed
6/4/2010	6:37:39 PM	SiCl4 pre valve closed
6/4/2010	6:37:39 PM	SiCl4 post valve closed
6/4/2010	6:37:39 PM	Main Vac valve closed
6/4/2010	6:37:39 PM	Bypass valve closed
6/4/2010	6:37:39 PM	Helium valve opened
6/4/2010	6:37:39 PM	Bubbler valve opened
6/4/2010	6:37:39 PM	Helium MFC set to  500.000000
6/4/2010	6:37:39 PM	H2 MFC set to  0.000000
6/4/2010	6:37:39 PM	BCl3 MFC set to  0.000000
6/4/2010	6:37:39 PM	PHl3 MFC set to  0.000000
6/4/2010	6:37:39 PM	SiCl4 MFC set to  0.000000
6/4/2010	6:37:39 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	6:37:39 PM	Tube furnace set to 0
6/4/2010	6:47:55 PM	Run aborted at 6:47 PM
6/4/2010	6:47:55 PM	Helium valve closed
6/4/2010	6:47:55 PM	H2 valve closed
6/4/2010	6:47:55 PM	BCl3 valve closed
6/4/2010	6:47:55 PM	PH3 valve closed
6/4/2010	6:47:55 PM	SiCl4 pre valve closed
6/4/2010	6:47:55 PM	SiCl4 post valve closed
6/4/2010	6:47:55 PM	Bypass valve closed
6/4/2010	6:47:55 PM	Main Vac valve closed
6/4/2010	6:47:55 PM	Bubbler valve closed
6/4/2010	6:47:55 PM	Helium MFC set to  0.000000
6/4/2010	6:47:55 PM	H2 MFC set to  0.000000
6/4/2010	6:47:55 PM	BCl3 MFC set to  0.000000
6/4/2010	6:47:55 PM	PHl3 MFC set to  0.000000
6/4/2010	6:47:55 PM	SiCl4 MFC set to  0.000000
6/4/2010	6:47:55 PM	Tube furnace set to 0
6/4/2010	6:55:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/4/2010	6:55:00 PM	Recipe started at 6:55 PM
6/4/2010	6:55:00 PM	Helium valve closed
6/4/2010	6:55:00 PM	H2 valve closed
6/4/2010	6:55:00 PM	BCl3 valve closed
6/4/2010	6:55:00 PM	PH3 valve closed
6/4/2010	6:55:00 PM	SiCl4 pre valve closed
6/4/2010	6:55:00 PM	SiCl4 post valve closed
6/4/2010	6:55:00 PM	Main Vac valve closed
6/4/2010	6:55:00 PM	Bubbler valve closed
6/4/2010	6:55:00 PM	Bypass valve opened
6/4/2010	6:55:00 PM	Helium MFC set to  0.000000
6/4/2010	6:55:00 PM	H2 MFC set to  0.000000
6/4/2010	6:55:00 PM	BCl3 MFC set to  0.000000
6/4/2010	6:55:00 PM	PHl3 MFC set to  0.000000
6/4/2010	6:55:00 PM	SiCl4 MFC set to  0.000000
6/4/2010	6:55:00 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	6:55:00 PM	Tube furnace set to 0
6/4/2010	6:55:47 PM	Helium valve closed
6/4/2010	6:55:47 PM	H2 valve closed
6/4/2010	6:55:47 PM	BCl3 valve closed
6/4/2010	6:55:47 PM	PH3 valve closed
6/4/2010	6:55:47 PM	SiCl4 pre valve closed
6/4/2010	6:55:47 PM	SiCl4 post valve closed
6/4/2010	6:55:47 PM	Bubbler valve closed
6/4/2010	6:55:47 PM	Main Vac valve opened
6/4/2010	6:55:47 PM	Bypass valve opened
6/4/2010	6:55:47 PM	Helium MFC set to  0.000000
6/4/2010	6:55:47 PM	H2 MFC set to  0.000000
6/4/2010	6:55:47 PM	BCl3 MFC set to  0.000000
6/4/2010	6:55:47 PM	PHl3 MFC set to  0.000000
6/4/2010	6:55:47 PM	SiCl4 MFC set to  0.000000
6/4/2010	6:55:47 PM	Bypass solenoid MFC set to  0.000000
6/4/2010	6:55:48 PM	Tube furnace set to 0
6/4/2010	6:55:48 PM	Run finished at 6:55 PM
6/4/2010	6:55:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
